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Specific Process Knowledge/Thermal Process/D4 III-V Oven: Difference between revisions

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{{cc-nanolab}}
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/D4_III-V_Oven click here]'''
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/D4_III-V_Oven click here]'''
 
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''This page is written by DTU Nanolab  internal''
===<span style="color:Red">The D4 III-V Oven has been decomission in August 2019.</span>===
===<span style="color:Red">EXPIRED. The D4 III-V Oven has been removed from the cleanroom August 2019. At the moment there is not replacement for it.</span>===
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[[Category: Equipment |Thermal III-V ]]
[[Category: Equipment |Thermal III-V ]]
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'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=187 III-V Oven (D4)]'''
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=187 III-V Oven (D4)]'''
==Process knowledge==
*[[Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_furnace_(D4)|Standard wet oxidation recipe on the III-V furnace]]


==Overview of the performance of the III-V Oven and some process related parameters==
==Overview of the performance of the III-V Oven and some process related parameters==