Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan33: Difference between revisions
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<!--Checked for updates on 10/7-2019 - ok/jmli --> | |||
<!-- Ok, jmli 20170627 --> | |||
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== The Sinano3.3 recipe == | == The Sinano3.3 recipe == | ||
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{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ '''Recipe Sinano3.3''' | |+ '''Recipe Sinano3.3''' | ||