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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_SEM click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_SEM click here]'''  
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=The SEM Tool Package Training =


<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] <span style="background:#FF2800">But the links to sign up for the for lectures, preparation materials etc. can still be used.
DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). This course is mandatory for academic users who want to perform SEM imaging at Nanolab unless you will only use the [[Specific Process Knowledge/Characterization/SEM_Tabletop_1|Hitachi TM3030 tabletop SEM]]. The course includes theory on scanning electron microscopy (including some reading and online lectures) followed by by quizzes for each section, as well as training videos for equipment operation. After completing the online course, a practical group training can be arranged.  
 
 
==The SEM TPT ==
 
DTU Nanolab has a number of SEMs (Scanning Electron Microscopes) for different applications. These SEMs are located in building 314, 346 and 375.
 
DTU Nanolab offers a Tool Package Training (TPT) course in SEM; the course includes theory on SEM, as well as training in instrument operation.  
 
The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab.
 
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!colspan="3"|SEM Tool Package Training
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!rowspan="3"|Schedule
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All participants
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'''Theoretical part'''
* A 3-hour lecture.  
 
<i>Sign up for here: https://danchip.doodle.com/poll/udmcihbbgudyynfy.
The next lecture(s) will be held on the 10th of August and/or on the 20th of August. Please sign up for both lectures, if you are available both days.  


Hopefully, the lectures can be held on DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make online lectures instead or to arrange an extra lecture. If you sign up for the lecture(s), you will get more information later.
The SEMs at DTU Nanolab are located in building 314/307 and 346. Different SEMs are used for different applications, and the practical training requirements differ from building to building and from SEM to SEM. The main SEM and TEM building is 314/307, which is open for all users from academia and industry. The SEMs in building 346 are reserved for users who work with fabrication at Nanolab, i.e., in the cleanroom or the other labs in buildings 346 and 347.
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If you need to use an SEM before the lectures, please write to SEM@nanolab.dtu.dk.</i>
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The SEM TPT course is available via DTU Learn. You can find it and enroll yourself 
[https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here].
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==Course Plan (Building 314/307)==
SEMs for all users from academia and industry; main SEM facility at DTU Nanolab. To gain access to the microscopes in building 314/307, please register [https://www.nanolab.dtu.dk/access/characterization/electron-microscopy-equipment here] and sign up for the theoretical online course (SEM TPT) in DTU Learn [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here].  


'''Theoretical part'''
You will receive an invitation to a meeting at 314 to discuss your project and requirements. The structure of the hands-on training depends heavily on the type of sample, type of characterization, i.e., which SEM, detectors, and sample preparation technique will be used, as well as previous user experience. <br>
* A 3-hour lecture.  
# Apply for access to SEMs in building 314/307 ([https://www.nanolab.dtu.dk/access/characterization/electron-microscopy-equipment here])
# Meeting at 314 to discuss your project
# Register for SEM TPT in DTU Learn ([https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here])
# SEM TPT: Online reading & lecture videos (theory) (*)
# SEM TPT: Quiz (*)
# Introduction course for Nanolab facility (NOT Cleanroom) in DTU Learn
# Introduction course for access to building 314/307 in DTU Learn
# Individual hands-on training
(*) As an alternative to watching the lecture videos and completing the quiz online, an in-person lecture is offered occasionally, mostly in combination with PhD courses or 3-week courses. Contact the [mailto:sem@nanolab.dtu.dk building 346 SEM group] or check the course page in DTU Learn for the next date.<br>
==Course Plan (Building 346) ==


<i>Sign up for here: https://danchip.doodle.com/poll/udmcihbbgudyynfy.  
SEM related to fabrication carried out at DTU Nanolab. To gain access to the SEMS in building 346 you need to have access to the cleanroom (please sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here]) or access to the basement in 346 (please sign up [https://www.nanolab.dtu.dk/access/other-facilities/form-sign-up-other-facilities here]). Please sign up for the theoretical online course (SEM TPT) in DTU Learn [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. [[File:SEM TPT.png|How to get access to SEM in building 346 ''(click on the picture to enlarge)''|alt=graphical description of SEM TPT layout (building 346)|thumb]]
   
# Register to gain access to building 346 (basement 346 or cleanroom)
The next lecture(s) will be held on the 10th of August and/or on the 20th of August. Please sign up for both lectures, if you are available both days.  
# Register for SEM TPT in DTU Learn ([https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here])
# SEM TPT: Online reading & lecture videos (theory) (*)
# SEM TPT: Quiz (*)
# Online training videos on equipment operation
# Read SEM Supra 1 manual
# Group hands-on training on SEM Supra 1 (basement 346) requested via [mailto:sem@nanolab.dtu.dk sem@nanolab.dtu.dk] (**)
# Individual hands-on training on SEM Supra 1 (basement 346) or SEM Supra 3 (cleanroom) requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]


Hopefully, the lectures can be held on DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make online lectures instead or to arrange an extra lecture. If you sign up for the lecture(s), you will get more information later.
If you need to use an SEM before the lectures, please write to SEM@nanolab.dtu.dk.</i>


'''Practical part'''
(*) As an alternative to watching the lecture videos and completing the quiz online, an in-person lecture is offered occasionally, mostly in combination with PhD courses or 3-week courses. Contact the [mailto:sem@nanolab.dtu.dk SEM group] or check the course page in DTU Learn for the next date.
* A 2-hour training session, max. 3 persons per session will be planed after the lecture
* A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
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SEM users in building 314 and 375
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SEM users in building 346
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(**) If a group hands-on training session not available in a timely manner, two individual hands-on training sessions can be arranged. <br>
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'''Commercial Users:''' The theoretical part of the SEM TPT (3. and 4.) is not mandatory for commercial users, though we strongly recommend it for new SEM operators. All users must watch the online training videos explaining the equipment operation (5.) specific to our Zeiss SEMs and read the manual (6.) of the relevant SEM prior to the hands-on training. If you do not think a group training (7.) is appropriate for your company, please contact the [mailto:sem@nanolab.dtu.dk 346 SEM group] to arrange two individual trainings.
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'''Qualifying Prerequisites'''
* Cleanroom safety course (sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here]),  '''or'''
* Intro building 346 (sign up [https://www.nanolab.dtu.dk/access/other-facilities/form-sign-up-other-facilities here], choose option: ''"Basement, polisher lapper/155 and dicer/157"'')<br>
===Material for preparations and further information===


!rowspan="3"|Location
''Please watch before the first hands-on training:''
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* [https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj Equipment operation training videos] ''(10 videos, total duration < 30 min)''
All participants
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'''Theoretical part'''
* SEM users in building 314, 346 and 375: The location of the lecture will be notified on the Doddle or after you have signed up
'''Practical part'''
* SEM users in building 314 and 375: The training session takes place building 314 or 375.
* SEM users in building 346: The SEM Supra 1 is used a training instrument. This SEM is located in building 346 room 904 (basement). The meeting point will be at the SEM Supra 1
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SEM users in building 314 and 375
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SEM users in building 346
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''Please read the SEM manuals before the second hands-on training:''
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=2180&mach=275 SEM Supra 1 manual] ''(outside cleanroom: 346/904)''
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=3389&mach=327 SEM Supra 2 manual]
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=4260&mach=361 SEM Supra 3 manual]
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=20052&mach=512 SEM Gemini 1 manual]
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=4950&mach=416 SEM Tabletop 1 manual] ''(outside cleanroom: 346/151)''
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!rowspan="3"|Qualified Prerequisites
==General course info==
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All participants
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* None
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SEM users in building 314 and 375
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SEM users in building 346
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'''Learning objectives'''


!rowspan="3"|Preparations
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All participants
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''All participants:''
'''Before the lecture'''
* Read "Scanning Electron Microscopy Primer" by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Nanolab. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found [http://www.charfac.umn.edu/sem_primer.pdf here]
''SEM users in using building 314 and 375''
* No other preparations
''SEM users in using building 346''
'''Before the first group training session'''
* Watch the training videos. You can find them on YouTube: https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj
'''Before the one-on-one hands-on training'''
* Read the user manual for SEM Supra. This can be found in LabManager [http://labmanager.dtu.dk/d4Show.php?id=2180&mach=275 here]
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SEM users in building 314 and 375
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SEM users in building 346
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!rowspan="3"|Course pesponsible
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All participants
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The SEM responsible persons in building 314, 346 and 375. Contact email: SEM@nanolab.dtu.dk.
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SEM users in building 314 and 375
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SEM users in building 346
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!rowspan="3"|Learning Objectives
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All participants
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* Explain SEM electron optics and detectors
* Explain SEM electron optics and detectors
* Understand possibilities and limitations
* Understand possibilities and limitations of SEM
* Optimize SEM images
* Know how to optimize SEM images
* Know where to go after the lecture – which tool and where
* Know which tool to use and who to contact
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<br>
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'''Course Responsible'''
SEM users in building 314 and 375
* Jonas Michael-Lindhard (346)
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* Rebecca Bolt Ettlinger (346)
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* Berit Wenzel (314/307)
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* Marie Karen Trace Hong Lin (314/307) - Softmatter and life science samples
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SEM users in building 346
If you have questions you can contact us via [mailto:sem@nanolab.dtu.dk SEM@nanolab.dtu.dk].
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xxx
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===Slides from the lecture===
*Lecture slide show [[Media:Nanolab_SEM_lecture_2020_June_LabAdviser.pptx]]
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