Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions

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'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''
 
'''All links to Kemibrug (SDS) and Labmanager Including APV requires login.'''
 
'''All measurements on this page has been made by Nanolab staff.'''
 
[[Category: Equipment|Etch Wet Titanium]]
[[Category: Etch (Wet) bath|Titanium]]


Ething of Titanium can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP]] using Chlorine chemistry or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300|IBE]] by sputtering with Ar ions.  
Ething of Titanium can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP]] using Chlorine chemistry or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300|IBE]] by sputtering with Ar ions.  


==Wet etching of Titanium==
==Wet etching of Titanium==
[[Image:Fumehoodetch-chrom2.jpg|300x300px|thumb|Fume hood: positioned in cleanroom 2. <br />Wet Etch of Titanium can take place in this pp tank or in a beaker in this fume hood]]
[[Image:Fumehood1-2.jpg|300x300px|thumb|Fume hood 01 and 02 in Cleanroom D-3 for working with acids and bases.<br>Wet etching of titanium can be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods]]


We have two solutions for wet titanium etching:
We have two solutions for wet titanium etching:
    
    
# BHF  
# BHF (beaker in fumehood)
# Cold RCA1
# Cold RCA1 (beaker in fumehood)
 
<br>
Do it by making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom 2.
Etching titanium in BHF or RCA1 mix is made by making your own solution in a beaker in either Fumehood 01 or 02 in Cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].




===Comparing the two solutions===
===Comparing the two solutions===
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-


{| border="1" cellspacing="0" cellpadding="4"  
|-
!  
|-style="background:silver; color:black"
!
! width="200" | BHF
! width="200" | BHF
! width="200" | Cold RCA1  
! width="200" | Cold RCA1  
|-  
|-  
|-style="background:WhiteSmoke; color:black"
|'''General description'''
|'''General description'''
| Etch of titanium with or without photoresist mask.
| Etch of titanium with or without photoresist mask.
| Etch of titanium (as stripper or with eagle resist).
| Etch of titanium (as stripper or with eagle resist).
|-
|-
|-style="background:LightGrey; color:black"
|'''Link to safety APV and KBA'''
|'''Link to safety APV and KBA'''
|[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see APV here]  
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]
|[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see APV here]  
[https://kemibrug.dk/Kemikalier?stofnavn=BHF See SDS here (requires Kemibrug login)]  
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]  
|-
|-
|-style="background:WhiteSmoke; color:black"
|'''Chemical solution'''
|'''Chemical solution'''
|HF:NH<sub>4</sub>F
|HF : NH<sub>4</sub>F : NH<sub>4</sub>HF<sub>2</sub>
|NH<sub>3</sub>OH:H<sub>2</sub>O<sub>2</sub>:H<sub>2</sub>O - 1:1:5
|H<sub>2</sub>O : NH<sub>4</sub>OH : H<sub>2</sub>O<sub>2</sub> - 5:1:1
|-
|-
|'''Process temperature'''
 
 
|-style="background:LightGrey; color:black"
!Process temperature
|Room temperature
|Room temperature
|Room temperature
|Room temperature
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|-
|-


|'''Possible masking materials'''
|-style="background:WhiteSmoke; color:black"
!Possible masking materials
|
|
Photoresist (1.5 µm AZ5214E)
Photoresist (1.5 µm AZ5214E)
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Eagle resist
Eagle resist
|-
|-
|'''Etch rate'''
 
|-style="background:LightGrey; color:black"
!Etch rate
|
|
Not known (it bubbles while etching)
Not known (it bubbles while etching)
|
|
Not known
50 nm etches in around 2 min
|-
|-
|'''Batch size'''
 
|-style="background:WhiteSmoke; color:black"
!Batch size
|
|
1-5 4" in beaker
1-5 wafers in beaker
1-25 wafers at a time in PP-etch bath
|
|
1-5 4" wafer at a time
1-5 wafers in beaker
|-
|-
|'''Etch bath'''
 
|Beaker or PP-etch bath in the fume hood in cleanroom 2.
|-style="background:LightGrey; color:black"
|Beaker
!Size of substrate
|Any size and number that can go inside the beaker in use.  
|Any size and number that can go inside the beaker in use.
|-
|-
|'''Allowed materials'''
 
|-style="background:WhiteSmoke; color:black"
!Allowed materials
|
|
No restrictions when used in beaker or PP-etch bath in the fume hood in cleanroom 2.  
Practically no restrictions when used in beaker. Make sure to use a plastic beaker, since glass will be attacked by BHF/HF.  
Make a note on the beaker of which materials have been processed.  
Make a note on the beaker of which materials have been processed.  
|
|
No restrictions when used in beaker.
Practically no restrictions when used in beaker.
Make a note on the beaker of which materials have been processed.  
Make a note on the beaker of which materials have been processed.  
|-
|-
|}
|}

Latest revision as of 12:44, 27 June 2024

Feedback to this page: click here

Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.

All links to Kemibrug (SDS) and Labmanager Including APV requires login.

All measurements on this page has been made by Nanolab staff.

Ething of Titanium can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with ICP using Chlorine chemistry or with IBE by sputtering with Ar ions.

Wet etching of Titanium

Fume hood 01 and 02 in Cleanroom D-3 for working with acids and bases.
Wet etching of titanium can be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods

We have two solutions for wet titanium etching:

  1. BHF (beaker in fumehood)
  2. Cold RCA1 (beaker in fumehood)


Etching titanium in BHF or RCA1 mix is made by making your own solution in a beaker in either Fumehood 01 or 02 in Cleanroom D-3. You can see the APV here.


Comparing the two solutions

BHF Cold RCA1
General description Etch of titanium with or without photoresist mask. Etch of titanium (as stripper or with eagle resist).
Link to safety APV and KBA see APV here

See SDS here (requires Kemibrug login)

see APV here
Chemical solution HF : NH4F : NH4HF2 H2O : NH4OH : H2O2 - 5:1:1
Process temperature Room temperature Room temperature
Possible masking materials

Photoresist (1.5 µm AZ5214E)

Eagle resist

Etch rate

Not known (it bubbles while etching)

50 nm etches in around 2 min

Batch size

1-5 wafers in beaker

1-5 wafers in beaker

Size of substrate Any size and number that can go inside the beaker in use. Any size and number that can go inside the beaker in use.
Allowed materials

Practically no restrictions when used in beaker. Make sure to use a plastic beaker, since glass will be attacked by BHF/HF. Make a note on the beaker of which materials have been processed.

Practically no restrictions when used in beaker. Make a note on the beaker of which materials have been processed.

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