Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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==From February 2024: RESIST PYROLYSIS FURNACE== | |||
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[[Category: Equipment |Thermal A2]] | [[Category: Equipment |Thermal A2]] | ||
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==The Multipurpose annealing furnace== | ==The Multipurpose annealing furnace== | ||
[[Image:ATV_ovn.jpg|thumb|365x365px|Multipurpose Annealing Furnace. Positioned in cleanroom B-1]] | [[Image:ATV_ovn.jpg|thumb|365x365px|Multipurpose Annealing Furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | ||
[[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the Multipurpose Annealing Furnace.]] | [[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the Multipurpose Annealing Furnace. Photo: DTU Nanolab internal]] | ||
The Multipurpose Annealing Furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015. | The Multipurpose Annealing Furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015. | ||