Specific Process Knowledge/Back-end processing/Micro transfer printer: Difference between revisions

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[[Category: Equipment|Backend]]
[[Category: Equipment|Backend]]
[[Category: Bckend]]
[[Category: Backend]]
 
 


__TOC__
__TOC__


=Stylus Profiler: Dektak150=


[[Image:DUV_wafers.jpg|500px|frameless|right|]]
=Micro Transfer Printer=


TextTextTextTextTextText
Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration,
TextTextText
where micro-components from different sources are picked up by polymer stamp and precisely assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for
increasing functionality and improving efficiency.


TextTextTextTextText
Micro transfer printer 1003 from Xdisplay was installed in year 2022 and placed in cleanroom F-4.
TextTextText


Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=503 Lab Manager] - '''requires login'''


'''[https://www.youtube.com/playlist?list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Training videos]'''
[[Image:Equipment.jpg|500x500px|thumb|The Micro transfer printer is placed in F-4]]


Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=464 LabManager] - '''requires login'''
[[Image:MTP image.jpg|1000px|thumb|left|Steps involved in pick and print]]


TextTextTextTextTextText
<br clear="all" />
TextText


==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  


 
!style="background:silver; color:black;" width="60"|Purpose  
!style="background:silver; color:black;" align="center" width="60"|Purpose  
|style="background:LightGrey; color:black"|
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
UV exposure
Pick and Print
|-
 
!style="background:silver; color:black" align="left" rowspan="5"|Performance


|style="background:LightGrey; color:black"|Exposure mode
|style="background:WhiteSmoke; color:black" colspan="2"|
*Flood exposure
*Proximity exposure with mask possible for 4inch substrate
*Inclined exposure
*Rotating exposure
|-
|-
| style="background:LightGrey; color:black"|Exposure light/filters
!style="background:silver; color:black;" width="60"|Material handling configuration
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
* Near UV(350-450nm)
Manual
* Mid UV (260-320nm)
* Deep UV(220-260nm)


|-
|-
|style="background:LightGrey; color:black"|Minimum structure size
!style="background:silver; color:black;" width="60"|Stage max. travel time (X x Y mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
300 x 300


|-
|-
|style="background:LightGrey; color:black"|Mask size
!style="background:silver; color:black;" width="60" |Source size (mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
5x5inch optinal
upto 150
 
|-
|-
|style="background:LightGrey; color:black"|Alignment modes
!style="background:silver; color:black;" width="60"|Target size (mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
No alignment possible
upto 150


|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black;" width="60"|Alignment accuracy (single post stamp)
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
Up to 8inch substrates, different shapes
<0.5um
 
|-
|-
| style="background:LightGrey; color:black"|Allowed materials
!style="background:silver; color:black" align="left" rowspan="3"|Allowed material
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
All cleanroom materials
All cleanroom materials
|-
 
|style="background:LightGrey; color:black"|Batch
|style="background:WhiteSmoke; color:black" colspan="2"|
1
|-  
|-  
|}
|}


<br clear="all" />
<br clear="all" />

Latest revision as of 11:46, 8 September 2023

The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.

Feedback to this page: click here


Micro Transfer Printer

Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration, where micro-components from different sources are picked up by polymer stamp and precisely assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for increasing functionality and improving efficiency.

Micro transfer printer 1003 from Xdisplay was installed in year 2022 and placed in cleanroom F-4.

Equipment info in Lab Manager - requires login

The Micro transfer printer is placed in F-4
Steps involved in pick and print


Equipment performance and process related parameters

Purpose

Pick and Print

Material handling configuration

Manual

Stage max. travel time (X x Y mm)

300 x 300

Source size (mm)

upto 150

Target size (mm)

upto 150

Alignment accuracy (single post stamp)

<0.5um

Allowed material

All cleanroom materials



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