Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions
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'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_Furnace click here]''' | '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_Furnace click here]''' | ||
''This page is written by DTU Nanolab internal'' | |||
===<span style="color:Red">EXPIRED! | ===<span style="color:Red">EXPIRED! | ||
The Resist Pyrolysis furnace has been removed from the cleanroom August 2019. Use the Multipurpose Anneal furnace instead.</span>=== | |||
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[[Category: Thermal process|Resist Pyrolysis]] | [[Category: Thermal process|Resist Pyrolysis]] | ||
[[Category: Furnaces|Resist Pyrolysis]] | [[Category: Furnaces|Resist Pyrolysis]] | ||
== Resist Pyrolysis Furnace == | == Resist Pyrolysis Furnace == | ||