View source for Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/C1 furnace break-down voltage measurement results

==Breakdown voltage results for the C1 Anneal-Oxide furnace==

===Dry oxidation===

{| border="2" cellspacing="2" cellpadding="5" style="text-align: center;"
|- 
|'''Date'''
|'''Oxidation recipe'''
|'''Oxide thickness'''
|'''Absolute break-down voltage'''
|'''Relative break-down voltage'''
<i>= Absolute break-down voltage/oxide thickness<i>
|-
|'''October 2023'''
|DRY1100
|510 nm
|[[image:2023-10-17_09-07-07_Wafer_C1_DRY1100_510nm_wRCA_Abs_edit.jpg|350x350px|thumb|left]]
|[[image:2023-10-17_09-07-07_Wafer_C1_DRY1100_510nm_wRCA_Rel_edit.jpg|350x350px|thumb|left]]
|-
|}