Deletion log

Below is a list of the most recent deletions.

15:03, 4 February 2026 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/EM with resist mask (content before blanking was: "==Etching SiO2 with DUV resist mask using EM coils== {{CC-bghe2}} *Removing the H2 from the recipe to get less redeposition @ 200W platen power, EM:02/30A <gallery caption="Recipe name: SiO2_res, Recipe no. 10+EM+edit coils: C09975 coil_2500W, platen:200W, EM:02/30A, Pressure:8.8mTorr, C4F8:25.6sccm, He:448.7sccm, H2:0sccm, 3:56 min " perrow="5"> File:C09975_00.jpg File:C09975_02.jpg File:C09975_03.jpg File:C09975_04.jpg File:C09975_05.jpg </gallery>")
09:29, 29 September 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/TRACER (content was: "Delete me", and the only contributor was "Thope" (talk))
19:32, 18 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBL (content was: "all content moved elsewhere", and the only contributor was "Thope" (talk))
14:03, 17 September 2025 Mmat talk contribs undeleted page Specific Process Knowledge/Lithography/EBeamLithography/TRACER (2 revisions)
14:03, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/RaithElphy (content was: "Delete me")
14:01, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (content was: "Delete me", and the only contributor was "Thope" (talk))
14:01, 17 September 2025 Mmat talk contribs undeleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (25 revisions) (check what links here)
14:01, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (content was: "Delete me", and the only contributor was "Thope" (talk))
14:00, 17 September 2025 Mmat talk contribs undeleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (25 revisions) (check "what links here")
13:59, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/TRACER (content was: "Delete me", and the only contributor was "Thope" (talk))
13:59, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (content was: "Delete me", and the only contributor was "Thope" (talk))
13:59, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBL/EBLresist (content was: "Delete me", and the only contributor was "Thope" (talk))
16:01, 4 September 2025 Bghe talk contribs deleted page Specific Process Knowledge/Thin Film deposition/ALD/Al2O3 deposition using ALD (content was: "This page needs to be deleted!")
16:01, 4 September 2025 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Germanium/Thermal Ge deposition Wordentec (content was: " Page to be deleted")
15:23, 9 August 2025 Mmat talk contribs deleted page Small MATLAB script (content was: "Content moved, please delete this page!")
14:37, 9 August 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/RTP ANNEALSYS (duplicate, there's another page with more or less same name and actual content)
16:49, 3 July 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2) (slated for deletion by PEVO)
22:14, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon//Standard recipes, QC limits and results for the 6" polysilicon furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_6%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is w...", and the only contributor was "Mmat" (talk))
22:08, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon//Standard recipes, QC limits and results for the 4" polysilicon furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_4%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is w...", and the only contributor was "Mmat" (talk))
22:08, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon/ (content was: "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:thinfilm@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Nitride/Deposition_of_Silicon_Nitride_using_LPCVD) click here]''' ==Deposition of polysilicon using LPCVD== /Standard recipes, QC limits and results for the...", and the only contributor was "Mmat" (talk))
22:08, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD/Standard recipes, QC limits and results for the 6" polysilicon furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_6%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal ==Standard recipes on the 6" polysilicon furnace (t...")
22:06, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD/Standard recipes, QC limits and results for the 4" polysilicon furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_4%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal ==Standard recipe on the 4" polysilicon furnace (th...")
17:40, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD (content was: "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:thinfilm@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Nitride/Deposition_of_Silicon_Nitride_using_LPCVD) click here]''' ==Deposition of polysilicon using LPCVD== /Standard recipes, QC limits and results for the 4"...", and the only contributor was "Pvl" (talk))
17:03, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Gold/Roughness of Au (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold/Roughness_of_Au click here]''' ''All contents by DTU Nanolab staff.'' ==Roughness and uniformity of Au layers == '''Experimental''' Au was deposited directly on unprocessed Si wafers (on top of the native oxide), and the deposited layers were thereafter examined w...")
16:53, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Nickel/Electroplating of nickel (content moved to "Eletcroplating of nickel"-page)
16:36, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Deposition of Chromium (moved to "Roughness of Chromium" (double "Deposition of chromium/Deposition of chromium" was misleading))
22:57, 17 June 2025 Mmat talk contribs undeleted page LabAdviser:General disclaimer (7 revisions) (link at the bottom of the page needs to be changed to "copyright" before this page can be deleted)
22:49, 17 June 2025 Mmat talk contribs deleted page Sputtering of Ti in Wordentec (content was: "to be deleted, contained no valuable information")
22:48, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Physimeca/Physimeca calibration (content was: "to be deleted, all info moved directoly to Physimeca")
22:43, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Characterization/Profiler/Stylus profiler measurement uncertainty (content was: "to be deleted, info moved to Dektaxt XTA")
22:43, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Characterization/Profiler/Apex software (content was: "to be deleted, all info moved to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Tencor_P17", and the only contributor was "Reet" (talk))
22:40, 17 June 2025 Mmat talk contribs deleted page Mask spec (content was: "to be deleted ")
15:57, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/ARN7500 (content was: "Information on AR-N 7500 to come.", and the only contributor was "Thope" (talk))
15:57, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBL/EBLsubstratePrep (content copy: https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/EBLsubstratePrep#User_supplied_resists)
14:36, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/B3 Furnace LPCVD TEOS (content was: "#REDIRECT Specific Process Knowledge/Thin film deposition/Furnace LPCVD TEOS", and the only contributor was "Mdyma" (talk))
14:33, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/B4 Furnace LPCVD PolySilicon (content was: "#REDIRECT Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon", and the only contributor was "Mdyma" (talk))
14:33, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of TEOS using LPCVD (content was: "#REDIRECT Specific Process Knowledge/Thin film deposition/Deposition of TEOS/Deposition of TEOS using LPCVD", and the only contributor was "Mdyma" (talk))
14:33, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/B2 Furnace LPCVD Nitride (content was: "#REDIRECT Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride", and the only contributor was "Mdyma" (talk))
14:33, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/C4 Furnace Aluminium Anneal (content was: "#REDIRECT Specific Process Knowledge/Thermal Process/C4 Aluminium Anneal furnace", and the only contributor was "Pvl" (talk))
14:32, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/C1 Furnace Anneal oxide (content was: "#REDIRECT Specific Process Knowledge/Thermal Process/C1 Furnace Anneal-oxide", and the only contributor was "Pvl" (talk))
14:32, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/A4 Furnace Phosphorus pre-dep (content was: "#REDIRECT Specific Process Knowledge/Thermal Process/A4 Phosphor Pre-dep furnace", and the only contributor was "Pvl" (talk))
14:29, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/A1 Furnace Boron drive-in (content was: "#REDIRECT Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace", and the only contributor was "Pvl" (talk))
14:27, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/UVExposure Dose (content was: "#REDIRECT Specific Process Knowledge/Lithography/Resist#Exposure_dose <!-- '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/UVExposure_Dose click here]''' =Exposure dose= Image:AZ photoresists spectral sensitivity - remake v1.png|400x400px|t...", and the only contributor was "Taran" (talk))
14:22, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/AR-N 7520 (content was: "#REDIRECT Specific Process Knowledge/Lithography/EBeamLithography/AR-N 7520 New", and the only contributor was "Thope" (talk))
14:16, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBSD of TiO2 (content was: "#REDIRECT Specific Process Knowledge/Thin film deposition/Deposition of Titanium Oxide/IBSD of TiO2", and the only contributor was "BGE" (talk))
14:14, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Characterization/XRD/dataconvertion (content was: "#REDIRECT Specific Process Knowledge/Characterization/XRD/dataconversion", and the only contributor was "Khara" (talk))
14:14, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Characterization/Film thickness measurement (content was: "#REDIRECT Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants", and the only contributor was "BGE" (talk))
14:13, 17 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Characterization/4-Point Probe (content was: "#REDIRECT Specific Process Knowledge/Characterization/Four-Point Probe", and the only contributor was "Mdyma" (talk))
14:10, 17 June 2025 Mmat talk contribs deleted page SLSII analysis (content was: "#REDIRECT Specific Process Knowledge/Characterization/XRD/SLSII analysis", and the only contributor was "Khara" (talk))
14:10, 17 June 2025 Mmat talk contribs deleted page RIE (Reactive Ion Etch) (content was: "#REDIRECT Specific Process Knowledge/Etch/RIE (Reactive Ion Etch)", and the only contributor was "BGE" (talk))