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Mask Aligner vs Maskless Aligner

Slides presented at NNUM in Uppsala 2026: MA6 vs MLA 2026_v09

Mask design used in the investigation: LithoTestAlign_2025_v10.gds

Additional data

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AZ 5214E

Resolution

Table with optimal parameters and resolution for different aligners
SEM pictures

Yield

Wafer maps of:
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-1
- Aligner: MA6-2 before service
- Aligner: MA6-2 after service + WEC pressure

**Wafer maps at optimal processing conditions for different aligners**


Aligner: Maskless 02 (MLA2).	Aligner: MA6-2	Aligner: MA6-1

Resist profile (sidewall angle and linewidth)

SEM pictures to support graphs?

Width of 2µm line vs. exposure dose for 1.5µm AZ 5214E.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).

Sidewall angle vs. exposure dose for 1.5µm AZ 5214E.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).

Linewidth and sidewall angle vs. defocus value for 1.5µm AZ 5214E exposed in Aligner: Maskless 02 (MLA2) using dose 95mJ/cm².
Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.

AZ MiR 701

Resolution

Table with optimal parameters and resolution for different aligners
SEM pictures

Resist profile (sidewall angle and linewidth)

SEM pictures to support graphs?

Width of 2µm line vs. exposure dose for 1.5µm AZ MiR 701.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).

Sidewall angle vs. exposure dose for 1.5µm AZ MiR 701.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).

Linewidth and sidewall angle vs. defocus value for 1.5µm AZ MiR 701 exposed in Aligner: Maskless 02 (MLA2) using dose 275mJ/cm².
Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.

AZ nLOF 2020

Resolution

Table with optimal parameters and resolution for different aligners
SEM pictures

Resist profile (sidewall angle and linewidth)

SEM pictures to support graphs?

Width of 2µm line vs. exposure dose for 2µm AZ nLOF 2020.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2).
Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).

Sidewall angle vs. exposure dose for 2µm AZ nLOF 2020.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2).
Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).

Linewidth and sidewall angle vs. defocus value for 2µm AZ nLOF exposed in Aligner: Maskless 01 (MLA1) using dose 220mJ/cm².
Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.

Linewidth and sidewall angle vs. defocus value for 2µm AZ nLOF exposed in Aligner: Maskless 02 (MLA2) using dose 450mJ/cm².
Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.