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Specific Process Knowledge/Lithography/Aligners/MAvsMLA

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Slides presented at NNUM in Uppsala 2026

MA6 vs MLA 2026_v09

Additional data

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AZ 5214E

Resolution / Yield

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2
  • Aligner: MA6-1

Sidewall angle

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2
  • Aligner: MA6-1

Linewidth / Bias

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2
  • Aligner: MA6-1

AZ MiR 701

Resolution

Sidewall angle

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2

Linewidth / Bias

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2

AZ nLOF 2020

Resolution

Sidewall angle

  • Aligner: Maskless 01 (MLA1)
  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2

Linewidth / Bias

  • Aligner: Maskless 01 (MLA1)
  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2
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