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Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/C1 furnace break-down voltage measurement results

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Breakdown voltage results for the C1 Anneal-Oxide furnace

Dry oxidation

Date Oxidation recipe Oxide thickness Absolute break-down voltage Relative break-down voltage

= Absolute break-down voltage/oxide thickness

October 2023 DRY1100 510 nm
 
 

The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.

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