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15:48, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Back-end processing/PDMS Microfluidics (content was: "#REDIRECT Specific Process Knowledge/Back-end processing/PDMS Process Line and Microfluidics", and the only contributor was "Cchvi" (talk))
15:43, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Back-end processing/PDMS Process Line and Microfluidics (page moved)
14:28, 8 September 2026 Mmat talk contribs created page Specific Process Knowledge/Polymer Processing/PDMS Casting (Created page with " ==PDMS Casting== File:Compartmentalized PDMS device for reconstruction of dopamine pathways between brain organoids.jpg|thumb|Example of PDMS lab application: Compartmentalized microfluidic device for reconstruction of dopamine pathways between brain organoids ([https://doi.org/10.64898/2025.12....")
14:10, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Polymer Processing/PolyFabLab/Coating/Parylene Coater
14:10, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Polymer Processing/PolyFabLab/Coating/Inkjet Printer
14:10, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Polymer Processing/PolyFabLab/Additive methods/Quantum X 2PP
14:10, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Polymer Processing/PolyFabLab/Additive methods/3D Printer - BMF (content was: "#REDIRECT Specific Process Knowledge/Polymer Processing/Polymer Processing/Additive methods/3D Printer - BMF", and the only contributor was "Meenadh" (talk))
14:08, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Polymer Processing/Polymer Processing/Coating/Parylene Coater (page moved)
14:08, 8 September 2026 Mmat talk contribs created page Specific Process Knowledge/Polymer Processing/Coating/Parylene Coater (Created page with "''The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.'' '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Polymer_Processing/Polymer_Processing_Coating_Parylene_Coater click here]''' 400px|right __TOC__ '''Parylene''' is the common name for a family of po...")
14:07, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Polymer Processing/Polymer Processing/Coating/Inkjet Printer (page moved)
14:06, 8 September 2026 Mmat talk contribs created page Specific Process Knowledge/Polymer Processing/Coating/Inkjet Printer (Created page with "Inkjet printinter")
11:02, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Polymer Processing/Polymer Processing/Additive methods/3D Printer - BMF (moved page)
11:01, 8 September 2026 Mmat talk contribs created page Specific Process Knowledge/Polymer Processing/Additive methods/3D Printer - BMF (Created page with "For 3D printers") Tag: Visual edit
10:56, 8 September 2026 Mmat talk contribs deleted page Specific Process Knowledge/Polymer Processing/Polymer Processing/Additive methods/Quantum X 2PP (paged moved to another link)
10:54, 8 September 2026 Mmat talk contribs created page Specific Process Knowledge/Polymer Processing/Additive methods/Quantum X 2PP (Created page with "thumb|470x470px|The Nanoscribe Quantum X align in PolyFabLab. == Introduction == The Nanoscribe Quantum X align is a 3D printer based on two-photon polymerization (2PP) and designed for rapid microfabrication of polymer structures. It features a femtosecond pulsed diode laser operating at 780 nm outputting a laser power of 250 mW. In addition, it is equipped with a sample stage with a 50 × 50 × 20 mm travel range that can fit up to an 8-in...")
09:41, 25 June 2026 Mmat talk contribs created page Specific Process Knowledge/Wafer cleaning/Triton-X soap cleaning (Created page with "==Triton-X soap cleaning== 300x300px|thumb|Soap sonic clean placed in the wash bench in the changing room (gowning). The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a non-ionic detergent which is metal ion-free. This detergent is added to reduce surface tension and thus helps removing particles...") Tag: Visual edit: Switched
12:28, 14 April 2026 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/mrEBL6000 (content before blanking was: " mrEBL6000 works as a negative e-beam resist but is also UV sensitive, why resist and coated wafers should be kept in yellow rooms only. When carrying the wafers to the e-beam writer, use a black or blue box for protection. While mounting the wafers in the e-beam cassettes, you can turn off the white light in the e-beam room and turn on the yellow light which is located above the pre-aligner setup. Please mount as close to exposure as possible and turn of...")
12:28, 14 April 2026 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithographyManual (content before blanking was: "= Purpose, location and technical specifications = The JEOL JBX-9500FS electron beam lithography system is a spot electron beam lithography system designed for use in writing patterns with dimensions from nanometers to sub-micrometers. Substrates that needs e-beam exposure should be mounted in a cassette and transferred into the writer via the robot loader (autoloader). To request for an e-beam training session, contact e-beam@nanolab.dtu.dk; a DTU Nanolab...")
19:32, 18 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBL (content was: "all content moved elsewhere", and the only contributor was "Thope" (talk))
14:03, 17 September 2025 Mmat talk contribs undeleted page Specific Process Knowledge/Lithography/EBeamLithography/TRACER (2 revisions)
14:03, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/RaithElphy (content was: "Delete me")
14:01, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (content was: "Delete me", and the only contributor was "Thope" (talk))
14:01, 17 September 2025 Mmat talk contribs undeleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (25 revisions) (check what links here)
14:01, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (content was: "Delete me", and the only contributor was "Thope" (talk))
14:00, 17 September 2025 Mmat talk contribs undeleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (25 revisions) (check "what links here")
13:59, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/TRACER (content was: "Delete me", and the only contributor was "Thope" (talk))
13:59, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (content was: "Delete me", and the only contributor was "Thope" (talk))
13:59, 17 September 2025 Mmat talk contribs deleted page Specific Process Knowledge/Lithography/EBL/EBLresist (content was: "Delete me", and the only contributor was "Thope" (talk))
15:23, 9 August 2025 Mmat talk contribs deleted page Small MATLAB script (content was: "Content moved, please delete this page!")
14:37, 9 August 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/RTP ANNEALSYS (duplicate, there's another page with more or less same name and actual content)
16:49, 3 July 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2) (slated for deletion by PEVO)
23:04, 1 July 2025 Mmat talk contribs created page Category:346 (Created page with "This category includes all pages related to DTU Nanolab building 346/347.")
22:14, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon//Standard recipes, QC limits and results for the 6" polysilicon furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_6%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is w...", and the only contributor was "Mmat" (talk))
22:08, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon//Standard recipes, QC limits and results for the 4" polysilicon furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_4%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is w...", and the only contributor was "Mmat" (talk))
22:08, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon/ (content was: "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:thinfilm@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Nitride/Deposition_of_Silicon_Nitride_using_LPCVD) click here]''' ==Deposition of polysilicon using LPCVD== /Standard recipes, QC limits and results for the...", and the only contributor was "Mmat" (talk))
22:08, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD/Standard recipes, QC limits and results for the 6" polysilicon furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_6%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal ==Standard recipes on the 6" polysilicon furnace (t...")
22:06, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD/Standard recipes, QC limits and results for the 4" polysilicon furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_4%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal ==Standard recipe on the 4" polysilicon furnace (th...")
22:02, 20 June 2025 Mmat talk contribs created page Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon/Standard recipes, QC limits and results for the 6" polysilicon furnace (Created page with " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_6%22_polysilicon_furnace click here]''' ==Standard recipes on the 6" polysilicon furnace (this recipe is being watched in the in the quality assurance program):== {| bor...")
22:01, 20 June 2025 Mmat talk contribs created page Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon/Standard recipes, QC limits and results for the 4" polysilicon furnace (Created page with " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_4%22_polysilicon_furnace click here]''' ==Standard recipe on the 4" polysilicon furnace (this recipe is being watched in the in the quality assurance program):== {| borde...")
21:45, 20 June 2025 Mmat talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Silicon/Deposition of Polysilicon using the 6" Polysilicon Furnace (Created page with " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_6%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal ==Standard recipes on the 6" polysilicon fur...")
21:44, 20 June 2025 Mmat talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Silicon/Deposition of Polysilicon using the 4" Polysilicon Furnace (Created page with " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_4%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal ==Standard recipe on the 4" polysilicon furn...")
17:40, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD (content was: "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:thinfilm@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Nitride/Deposition_of_Silicon_Nitride_using_LPCVD) click here]''' ==Deposition of polysilicon using LPCVD== /Standard recipes, QC limits and results for the 4"...", and the only contributor was "Pvl" (talk))
17:40, 20 June 2025 Mmat talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon//Standard recipes, QC limits and results for the 6" polysilicon furnace (Created page with " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_6%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal ==Standard recipes on the 6" polysilicon fur...")
17:39, 20 June 2025 Mmat talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon//Standard recipes, QC limits and results for the 4" polysilicon furnace (Created page with " '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_4%22_polysilicon_furnace click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal ==Standard recipe on the 4" polysilicon furn...")
17:39, 20 June 2025 Mmat talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Polysilicon/ (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:thinfilm@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Nitride/Deposition_of_Silicon_Nitride_using_LPCVD) click here]''' ==Deposition of polysilicon using LPCVD== /Standard recipes, QC limits and results for the 4" polysilicon furnace|Standard recipes, QC limits and results for the 4" polysilicon...")
17:03, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Gold/Roughness of Au (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold/Roughness_of_Au click here]''' ''All contents by DTU Nanolab staff.'' ==Roughness and uniformity of Au layers == '''Experimental''' Au was deposited directly on unprocessed Si wafers (on top of the native oxide), and the deposited layers were thereafter examined w...")
16:53, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Nickel/Electroplating of nickel (content moved to "Eletcroplating of nickel"-page)
16:36, 20 June 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Deposition of Chromium (moved to "Roughness of Chromium" (double "Deposition of chromium/Deposition of chromium" was misleading))
16:30, 20 June 2025 Mmat talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Roughness of Chromium (Created page with "= Roughness of Cr layers = ''The results and text here is from Katharina Nilson, staff @ Nanolab (then Danchip) (August 2008)'' Cr have been deposited with both E-beam evaporation and sputtering deposition to examine if there are differences in the roughness of the Cr layers. '''Experimental''' Cr depositions have been done directly on unprocessed Si wafers, all depositions has been done in Wordentec (tool decommissioned in 2025). The deposited layers have thereafter...")
16:11, 20 June 2025 Mmat talk contribs created page Decommissioned Equipment (Created page with "=List of decommissioned Equipment= Below is a list of decommissioned equipment that is kept as reference for other Equipment.") Tag: Visual edit: Switched