LabAdviser/Courses
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Tool Package Training (TPT)
For selected equipment groups, we create online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory.
| Course | Mandatory ... | Short Course Decription |
|---|---|---|
| Lithography TPT | for working with Lithography Equipment | This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the Lithography TPT and sign up here. |
| Thin Film TPT | for getting access to Thin Film Deposition & Thermal Growth Equipment | This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the Thin Film TPT and sign up here. |
| Dry Etch TPT | for getting access to Dry Etch Equipment | This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the Dry Etch TPT and sign up here |
| SEM TPT | for getting access to SEMs in 346 and 314/307 | This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346 at DTU Nanolab. Find more information on the SEM TPT and sign up here. |
| E-beam Lithography TPT | for getting access to E-beam Lithography Tools | This online course is currently under prepration. It will include theory on electron beam lithography and equipment, as well as training in preparation of exposure files and equipment operation. The course is a prerequisite for hands-on training on the electron beam tool. Currently study material is sent out by the respective equipment trainer. |
| Ellipsometer Tutorial | for getting access to the Ellipsometers | This online course consists of two short online tutorials |
Links to training videos
DTU Nanolab has a YouTube channel where we have gathered all our training videos: [1]
We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube
Safety and behavior
- Nanolab introduction course: Safety in the Cleanroom [2]
- Cleanroom safety at DTU Nanolab [3]
- Working with chemicals in the cleanroom at DTU Nanolab [4]
- Behaviour in the cleanroom at DTU Nanolab [5]
- Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [6]
Labmanager and Labadviser
- Playlist: DTU Nanolab systems (Labmanager and Labadviser)[7]
Wet chemistry
- Training in fume hoods part 1 - Intro and Getting Started [8]
- Training in fume hoods part 2 - Working With Acids, Bases and Solvents [9]
- Training in fume hoods part 3 – Wet benches and errors [10]
- Using Quick Dump Rinse Baths [11]
- Native Silicon Dioxide Removal [12]
Lithography
- Playlist: Lithography TPT - lecture videos [13]
- Playlist: Lithography TPT - tool training (Spin Coater, Mask Aligner MA6-2, Automatic Puddle Developer) [14]
- Playlist: Lithography TPT - tool training (Maskless Aligner) [15]
Thin Film deposition and oxidation
- Playlist: E-beam evaporator (Temescal) [20]
- Lesker dual chamber sputter system at DTU Nanolab [21]
- Antistiction treatment [22]
- Furnace training: Oxidation furnace [23]
Dry Etch
Characterization
- Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [26]
- Playlist: AFM Icon Nanoscope software training part I/II/III [27]
- Ellipsometer training [28]
- Playlist: XPS [29]
Backend tools
- Disco Dicing saw - blade exchange [30]