Jump to content

Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/C1 furnace break-down voltage measurement results: Difference between revisions

Pevo (talk | contribs)
Created page with "==Breakdown voltage results for the C1 Anneal-Oxide furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' <i>= Absolute break-down voltage/oxide thickness<i> |- |'''October 2023''' |DRY1100 |510 nm |350x350px|thumb|left..."
 
Pevo (talk | contribs)
 
Line 19: Line 19:
|-
|-
|}
|}
<i>The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.<i>