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Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions

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== '''Recipe and process performance''' ==
== '''Recipe and process performance''' ==


[[image:eves_20210126_Cr_thermal_evaporator_09.png|center|300x300px|thumb|Figure 10. Thickness distribution across 6" wafer.]]
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=== '''Deposition of 100 nm''' ===
=== '''Deposition of 100 nm''' ===