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| == '''Process development''' == | | == '''Process development''' == |
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| === '''Initial test runs''' ===
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| === '''Second run''' ===
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| The adjusted tooling factor is 173%. 6" wafer is loaded with a shadowed mask. Measured base pressure before start 7 10<sup>-6</sup> Torr. Deposition thickness setpoint is set to 100 nm.
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| {| border="2" cellspacing="0" cellpadding="9"
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| !colspan="1" border="none" style="background:silver; color:black;" align="center"|Pressure (Torr)
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| |style="background:silver; color:black"|<b>Deposition rate (Å/s)</b>
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| |style="background:silver; color:black"|<b>Output power (W)</b>
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| |style="background:silver; color:black"|<b>Deposited thickness (nm)</b>
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| |style="background:silver; color:black"|<b>Comment</b>
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| |-
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| !style="background:WhiteSmoke; color:black;" align="center"|1.9 10<sup>-6</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|1.0
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| |style="background:WhiteSmoke; color:black" align="center"|24.3
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| |style="background:WhiteSmoke; color:black" align="center"|0
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|7.9 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.97
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| |style="background:WhiteSmoke; color:black" align="center"|24.6
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| |style="background:WhiteSmoke; color:black" align="center"|10
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|5.9 10<sup>-7</sup>
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|
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| |style="background:WhiteSmoke; color:black" align="center"|0.97
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| |style="background:WhiteSmoke; color:black" align="center"|25.5
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|
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| |style="background:WhiteSmoke; color:black" align="center"|20
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|5.7 10<sup>-7</sup>
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|
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| |style="background:WhiteSmoke; color:black" align="center"|0.97
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| |style="background:WhiteSmoke; color:black" align="center"|26.1
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|
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| |style="background:WhiteSmoke; color:black" align="center"|30
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|6.1 10<sup>-7</sup>
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|
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| |style="background:WhiteSmoke; color:black" align="center"|0.98
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|
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| |style="background:WhiteSmoke; color:black" align="center"|26.4
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|
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| |style="background:WhiteSmoke; color:black" align="center"|40
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|6.6 10<sup>-7</sup>
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|
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| |style="background:WhiteSmoke; color:black" align="center"|1.0
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|
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| |style="background:WhiteSmoke; color:black" align="center"|26.8
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|
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| |style="background:WhiteSmoke; color:black" align="center"|56
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|6.9 10<sup>-7</sup>
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|
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| |style="background:WhiteSmoke; color:black" align="center"|0.99
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|
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| |style="background:WhiteSmoke; color:black" align="center"|27.0
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|
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| |style="background:WhiteSmoke; color:black" align="center"|60
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|7.4 10<sup>-7</sup>
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|
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| |style="background:WhiteSmoke; color:black" align="center"|0.99
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|
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| |style="background:WhiteSmoke; color:black" align="center"|27.2
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|
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| |style="background:WhiteSmoke; color:black" align="center"|70
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|7.6 10<sup>-7</sup>
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|
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| |style="background:WhiteSmoke; color:black" align="center"|0.99
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|
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| |style="background:WhiteSmoke; color:black" align="center"|27.3
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|
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| |style="background:WhiteSmoke; color:black" align="center"|80
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center" |7.9 10<sup>-7</sup>
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|
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| |style="background:WhiteSmoke; color:black" align="center"|1.0
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|
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| |style="background:WhiteSmoke; color:black" align="center"|27.4
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|
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| |style="background:WhiteSmoke; color:black" align="center"|90
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|
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| |style="background:WhiteSmoke; color:black" align="center"|fine
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|
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| |-
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| !style="background:WhiteSmoke; color:black" align="center" |-
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|
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| |style="background:WhiteSmoke; color:black" align="center"|-
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|
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| |style="background:WhiteSmoke; color:black" align="center"|-
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|
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| |style="background:WhiteSmoke; color:black" align="center"|100
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|
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| |style="background:WhiteSmoke; color:black" align="center"|(Cr still intact all places on the rod, only at the centrum some slightly visible retraction.)
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|
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| |-
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| |}
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| <br>
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| <!-- -->
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| [[image:eves_20210126_Cr_thermal_evaporator_09.png|center|300x300px|thumb|Figure 10. Thickness distribution across 6" wafer.]] | | [[image:eves_20210126_Cr_thermal_evaporator_09.png|center|300x300px|thumb|Figure 10. Thickness distribution across 6" wafer.]] |
