Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions
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=Recipes on PECVD1 for deposition of silicon oxides <span style="color:Red"> | =Recipes on PECVD1 for deposition of silicon oxides <span style="color:Red">EXPIRED!!!</span>= | ||
===Recipes=== | ===Recipes=== | ||
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