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Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A3 furnace break-down voltage measurement results: Difference between revisions

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Created page with "==Breakdown voltage results for the A3 Phosphorus Drive-in furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''November 2021''' |DRY1050 |118 nm |350x350px|thumb|left |image:2021-11-09_08-27-49_Wafer_A3_DRY1050_118nm_R..."
 
Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,370 edits
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|'''Absolute break-down voltage'''
|'''Absolute break-down voltage'''
|'''Relative break-down voltage'''
|'''Relative break-down voltage'''
<i>= Absolute break-down voltage/oxide thickness<i>
|-
|-
|'''November 2021'''
|'''November 2021'''
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|'''Absolute break-down voltage'''
|'''Absolute break-down voltage'''
|'''Relative break-down voltage'''
|'''Relative break-down voltage'''
<i>= Absolute break-down voltage/oxide thickness<i>
|-
|-
|'''November 2021'''
|'''November 2021'''
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