Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions
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Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, for the Cr thermal source we have experimented with Cr pellets in a W boat as well as dedicated 4" long chromium plated tungsten rods (supplier: KJLC). | Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, for the Cr thermal source we have experimented with Cr pellets in a W boat as well as dedicated 4" long chromium plated tungsten rods (supplier: KJLC). | ||
The process described on this page uses the Cr plated W rod. However, we have found that using Cr pellets is easier in the long run as it does not require modifying the chamber layout. So the current method you will most likely use is evaporation of Cr pellets from a boat (2025). There will be some differences from what is described below, e.g., uniformity will be different | The process described on this page uses the Cr plated W rod. However, we have found that using Cr pellets is easier in the long run as it does not require modifying the chamber layout. So the current method you will most likely use is evaporation of Cr pellets from a boat (2025). There will be some differences from what is described below, e.g., uniformity will be different. | ||
==Cr evaporation from Cr-coated W rod== | ==Cr evaporation from Cr-coated W rod== | ||