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| === '''Initial test runs''' === | | === '''Initial test runs''' === |
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| === '''First run''' ===
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| The initial tooling factor is 148%. 6" wafer is loaded with a shadowed mask. Measured base pressure before start is in order of 10<sup>-7</sup> Torr, since the chamber stayed pumped for a few hours. Deposition thickness setpoint is set to 100 nm.
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| {| border="2" cellspacing="0" cellpadding="9"
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| !colspan="1" border="none" style="background:silver; color:black;" align="center"|Pressure (Torr)
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| |style="background:silver; color:black"|<b>Deposition rate (Å/s)</b>
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| |style="background:silver; color:black"|<b>Output power (W)</b>
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| |style="background:silver; color:black"|<b>Deposited thickness (nm)</b>
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| |style="background:silver; color:black"|<b>Comment</b>
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| |-
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| !style="background:WhiteSmoke; color:black;" align="center"|-
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| |style="background:WhiteSmoke; color:black" align="center"|1.0
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| |style="background:WhiteSmoke; color:black" align="center"|24.4
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| |style="background:WhiteSmoke; color:black" align="center"|0
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| |style="background:WhiteSmoke; color:black" align="center"|-
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|1.1 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|1.0
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| |style="background:WhiteSmoke; color:black" align="center"|25.1
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| |style="background:WhiteSmoke; color:black" align="center"|10
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| |style="background:WhiteSmoke; color:black" align="center"|-
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|1.1 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|1.0
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| |style="background:WhiteSmoke; color:black" align="center"|27
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| |style="background:WhiteSmoke; color:black" align="center"|20
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| |style="background:WhiteSmoke; color:black" align="center"|Cr started to retract from one of the sides toward another (30% opened area)
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|1.2 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.94
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| |style="background:WhiteSmoke; color:black" align="center"|28.7
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| |style="background:WhiteSmoke; color:black" align="center"|30
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| |style="background:WhiteSmoke; color:black" align="center"|(40% opened area)
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|1.3 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.94
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| |style="background:WhiteSmoke; color:black" align="center"|30.4
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| |style="background:WhiteSmoke; color:black" align="center"|40
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| |style="background:WhiteSmoke; color:black" align="center"|(45% opened area)
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|1.4 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.94
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| |style="background:WhiteSmoke; color:black" align="center"|32.1
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| |style="background:WhiteSmoke; color:black" align="center"|50
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| |style="background:WhiteSmoke; color:black" align="center"|(50% opened area)
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|1.5 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.95
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| |style="background:WhiteSmoke; color:black" align="center"|34.1
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| |style="background:WhiteSmoke; color:black" align="center"|60
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| |style="background:WhiteSmoke; color:black" align="center"|(60% opened area)
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|1.7 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.92
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| |style="background:WhiteSmoke; color:black" align="center"|36.3
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| |style="background:WhiteSmoke; color:black" align="center"|70
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| |style="background:WhiteSmoke; color:black" align="center"|(65-70% opened area)
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| |-
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| !style="background:WhiteSmoke; color:black" align="center"|2.6 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.92
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| |style="background:WhiteSmoke; color:black" align="center"|38.7
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| |style="background:WhiteSmoke; color:black" align="center"|80
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| |style="background:WhiteSmoke; color:black" align="center"|(80% opened area)
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| |-
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| !style="background:WhiteSmoke; color:black" align="center" |5.4 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.91
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| |style="background:WhiteSmoke; color:black" align="center"|41.5
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| |style="background:WhiteSmoke; color:black" align="center"|90
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| |style="background:WhiteSmoke; color:black" align="center"|(90% opened area)
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| |-
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| !style="background:WhiteSmoke; color:black" align="center" |8.7 10<sup>-7</sup>
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| |style="background:WhiteSmoke; color:black" align="center"|0.92
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| |style="background:WhiteSmoke; color:black" align="center"|43.9
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| |style="background:WhiteSmoke; color:black" align="center"|100
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| |style="background:WhiteSmoke; color:black" align="center"|(96% opened area, almost all Cr is gone now and emptied W rod illuminates a very bright light.)
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| |-
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| |}
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| <br>
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| <!-- -->
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| [[image:eves_20210126_Cr_thermal_evaporator_08.png|center|300x300px|thumb|Figure 9. Thickness distribution across 6" wafer.]]
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| <br>
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| <!-- -->
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| === '''Second run''' === | | === '''Second run''' === |
