Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions
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=Recipes on PECVD1 for deposition of silicon oxides= | |||
===Recipes=== | ===Recipes=== | ||
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==Recipes on PECVD3 for deposition of silicon oxides | |||
=Recipes on PECVD2 for deposition of silicon oxides= | |||
===Recipes=== | |||
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|- | |||
|Recipe name | |||
|SiH4 flow [sccm] | |||
|N<math>_2</math>O flow [sccm] | |||
|N2 flow [sccm] | |||
|Pressure [mTorr] | |||
|Power [W] | |||
|Description | |||
|- | |||
|LFSiO | |||
|12 | |||
|1420 (setting i software is 710) | |||
|392 | |||
|550 | |||
|100 | |||
| | |||
|- | |||
|} | |||
LF=Low Frequency | |||
===Expected results=== | |||
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|- | |||
|Recipe name | |||
|Deposition rate [nm/min] | |||
|RI | |||
|Uniformity [%] | |||
|- | |||
|LFSiO | |||
|~100 | |||
|~1.48 | |||
|<1 | |||
|- | |||
|} | |||
=Recipes on PECVD3 for deposition of silicon oxides= | |||
===Recipes=== | ===Recipes=== | ||
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Revision as of 09:40, 30 September 2010
At the moment DANCHIP has 3 PECVDs that can deposite silicon oxide with or without dopants of Boron, Phosphorous or Germanium. PECVD1 and PECVD3 are for silicon based processing. PECVD2 is for III-V processing and will be describes under III-V processing. Look at the PECVD page to learn more about the PECVDs at DANCHIP. All though PECVD1 and PECVD3 are very much alike you cannot count on the a recipe on one system will give exactly the same results on the other system.
Recipes on PECVD1 for deposition of silicon oxides
Recipes
| Recipe name | SiH4 flow [sccm] | NO flow [sccm] | N2 flow [sccm] | B2H6 flow [sccm] | PH3 flow [sccm] | Pressure [mTorr] | Power [W] | Description |
| 1oxide/standard | 17 | 1600 | 0 | 0 | 0 | 400 | 380LF | Developed for waveguides |
| 1PBSG | Developed for waveguide top cladding by Haiyan Ou @DTU Photonics |
Expected results
| Recipe name | Deposition rate [µm/min] | RI | Uniformity [%] |
| 1oxide/standard | ~0.193 | 1.46 | 2 |
| 1PBSG | ~0.3 |
Recipes on PECVD2 for deposition of silicon oxides
Recipes
| Recipe name | SiH4 flow [sccm] | NO flow [sccm] | N2 flow [sccm] | Pressure [mTorr] | Power [W] | Description |
| LFSiO | 12 | 1420 (setting i software is 710) | 392 | 550 | 100 |
LF=Low Frequency
Expected results
| Recipe name | Deposition rate [nm/min] | RI | Uniformity [%] |
| LFSiO | ~100 | ~1.48 | <1 |
Recipes on PECVD3 for deposition of silicon oxides
Recipes
| Recipe name | SiH4 flow [sccm] | NO flow [sccm] | N2 flow [sccm] | Pressure [mTorr] | Power [W] | Description |
| LFSiO | 12 | 1420 | 392 | 550 | 60 |
LF=Low Frequency
Expected results
| Recipe name | Deposition rate [nm/min] | RI | Uniformity [%] |
| LFSiO | ~81 | ~1.48 | <1 |