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Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions

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<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br>
<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br>
All images and photos on this page belongs to <b>DTU Nanolab</b>.<br>
All images and photos on this page belongs to <b>DTU Nanolab</b>.<br>
The fabrication and characterization described below were conducted in <b>2020 by Evgeniy Shkondin.</b> The shield design was developed by <b>Henrik Nielsen (Nanolab, ThinFilm)</b>, and build by Nanolab Facility service</b>.<br></i>
The fabrication and characterization described below were conducted in <b>2020 by Evgeniy Shkondin.</b> The shield design was developed by <b>Henrik Nielsen (Nanolab, ThinFilm)</b>, and built by Nanolab Facility service</b>.<br></i>




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Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, for the Cr thermal source we have experimented with Cr pellets in a W boat as well as dedicated 4" long chromium plated tungsten rods (supplier: KJLC).  
Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, for the Cr thermal source we have experimented with Cr pellets in a W boat as well as dedicated 4" long chromium plated tungsten rods (supplier: KJLC).  


The process described on this page uses the Cr plated W rod. However, we have found that using Cr pellets is easier in the long run as it does not require modifying the chamber layout. So the current method you will most likely use is evaporation of Cr pellets from a boat (2025). There will be some differences from what is described below, e.g., uniformity will be different. See the instrument manual for details on the process.
The process and resulting material characteristics described on this page were done using the Cr plated W rod. However, we have found that using Cr pellets is easier in the long run as it does not require modifying the chamber layout. So the current method you will most likely use is evaporation of Cr pellets from a boat (2025). There will be some differences from what is described below, e.g., uniformity will be different. You can still use the results from XRD/XRR, XPS, SEM, and AFM as an indication of what you might expect and as a guide for relevant investigations.


==Cr evaporation from Cr-coated W rod==
==Cr evaporation from Cr-coated W rod==
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