Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A3 furnace break-down voltage measurement results: Difference between revisions
Created page with "==Breakdown voltage results for the A3 Phosphorus Drive-in furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''November 2021''' |DRY1050 |118 nm |350x350px|thumb|left |image:2021-11-09_08-27-49_Wafer_A3_DRY1050_118nm_R..." |
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<i>= Absolute break-down voltage/oxide thickness<i> | |||
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<i>= Absolute break-down voltage/oxide thickness<i> | |||
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<i>The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.<i> | |||
Latest revision as of 12:52, 16 September 2025
Breakdown voltage results for the A3 Phosphorus Drive-in furnace
Dry oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| November 2021 | DRY1050 | 118 nm |  |
 |
| February 2022 | DRY1050 | 113 nm |  |
 |
| September 2023 | DRY1050 | 113 nm |  | |
| November 2023 | DRY1100 | 490 nm |  |
 |
| February 2024 | DRY1050 | 115 nm |  |
 |
| April 2025 | DRY1050 | 114 nm |  |
 |
Wet oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| November 2021 | WET1050 | ~320 nm |  |
 |
| January 2024 | WET1050 | ~308 nm |  |
 |
The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.