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Recipe	General			Pressure			Gases						Generators				Matching				Results
							C4F8			SF6			Coil	Platen			Coil		Platen
	T	S/E	Dp	D	B	M	D	B	M	D	B	M	Dp	Dep			L	T	L	T	Pressure	Runs
	H/L	Cyc	Et	D	B	M	D	B	M	D	B	M	Et	D	B	M	L	T	L	T	Keywords