Specific Process Knowledge: Difference between revisions
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2nd Level - Process Topic
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|Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru <br> | |Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru <br> | ||
Semiconductors: Si, Ge, ZnO <br> | Semiconductors: Si, Ge, ZnO <br> | ||
Oxides: | Oxides: SiO<sub>2</sub>, ITO, TiO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, MgO, Ta<sub>2</sub>O<sub>3</sub> Cr<sub>2</sub>O<sub>3</sub><br> | ||
Transparent Conducting Oxides: ITO, AZO<br> | Transparent Conducting Oxides: ITO, AZO<br> | ||
Alloys: TiW, NiCr, AlTi, NiV, AlCu, CoFe, CuTi, FeMn, MnIr, NiCo, NiFe, YSZ <br> | Alloys: TiW, NiCr, AlTi, NiV, AlCu, CoFe, CuTi, FeMn, MnIr, NiCo, NiFe, YSZ <br> | ||
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|Metals: Ti, Cr, Al, Ni, Pt, Au, Mo, Pd, Ag, Cu, W, Ta <br> | |Metals: Ti, Cr, Al, Ni, Pt, Au, Mo, Pd, Ag, Cu, W, Ta <br> | ||
Semiconductors: Si, Ge <br> | Semiconductors: Si, Ge <br> | ||
Oxides: | Oxides: SiO<sub>2</sub>, TiO<sub>2</sub> <br> | ||
Alloys: NiCr, TiAl | Alloys: NiCr, TiAl | ||
|- | |- | ||
|LPCVD | |LPCVD | ||
| | |Si<sub>3</sub>N<sub>4</sub>, SRN, SiO<sub>2</sub>, Si (poly and amorph) | ||
|- | |- | ||
|PECVD | |PECVD | ||
| | |Si<sub>3</sub>N<sub>4</sub>, SiO<sub>2</sub>, PBSG | ||
|- | |- | ||
|Electroplating | |Electroplating |
Revision as of 17:27, 17 November 2014
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