Specific Process Knowledge/Wafer cleaning/Triton-X soap cleaning
Triton-X soap cleaning
The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a non-ionic detergent which is metal ion-free. This detergent is added to reduce surface tension and thus helps removing particles from the samples to be cleaned.
Procedure
The bench in the gowning contains a sink, an ultrasonics bath and a rinse bath for rinsing samples cleaned in Triton X-100. To clean the samples:
- Find a suitable holder for your samples in the cupboard below the baths
- Make sure the ultrasonics bath dump valve is closed
- Fill the ultrasonics bath (the one made of metal) with DI water until your samples are completely covered
- Add 20 - 30 drops of diluted Triton X-100 detergent from the rinse/spray bottle. Do NOT use undiluted Triton X-100
- Close the bath lid to minimize noise from the ultrasonics bath
- Start the ultrasound on the front panel
- Leave the samples in ultrasonics for 10 min
- Switch off ultrasound
- Fill the rinse bath (the one made in plastic) with DI water and rinse your samples thoroughly
- Remove and dry your samples
- Dump the Triton X-100 solution and rinse bath. Rinse both tanks with DI water. Leave dump valves open so the baths drain completely
- Continue with Piranha cleaning.