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Bringing samples into the DTU Nanolab cleanroom

To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the Request to bring samples into cleanroom form and submitting it to training@nanolab.dtu.dk.

If permission is granted the standard cleaning process for the approved substrates are

Triton-X soap cleaning as described below
10 min cleaning in a piranha solution (sulphuric acid and hydrogen peroxide)

If the samples can not handle such a cleaning process it must be specified in the form and an alternative cleaning process must be suggested by the user.

Triton-X soap cleaning

Soap sonic clean placed in the wash bench in the changing room (gowning).

The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a nonionic detergent which is metal ion free. This detergent is added to reduce surface tension and thus help removing particles from the samples to be cleaned.

Procedure

The bench in gowning contains a sink, an ultrasonics bath and a rinse bath for rinsing samples cleaned in Triton X-100. To clean the samples:

Find a suitable holder for your samples in the cupboard below the baths
Make sure the ultrasonics bath dump valve is closed
Fill the ultrasonics bath (the one made of metal) with DI water (enough to completely cover your samples)
Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do NOT use undiluted Triton X-100)
Close the bath lid to minimize noise from the ultrasonics bath
Start ultrasonics on the front panel
Leave sample in ultrasonics for 10 min
Switch off ultrasonics
Fill rinse bath (the one made in plastic) with DI water and rinse your samples
Remove samples and dry them
Dump the Triton X-100 solution and rinse baths to drain. Rinse tanks with DI water. Leave dump valves open so the baths drain completely
Continue with piranha.