Specific Process Knowledge/Thin film deposition/Deposition of TiW

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Sputtering of TiW

Deposition of TiW alloy was done in the past in the Wordentec. This tool is now decommissioned, and if necessary processes may be developed for depositing TiW in the Lesker sputter setups (contact responsible staff for this).

• Sputtering of TiW in Wordentec
• Results of a study on the grain size and uniformity of TiW sputtered in the Wordentec