Specific Process Knowledge/Pattern Design/CleWin

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Mask Design Software

clewin 6 software image (source: https://wieweb.com/site/product/clewin-6/)

At DTU Nanolab we offer all users of the cleanroom free access to CleWin 6 for their mask layout.

On 01 September 2024, our license for Clewin 5 expired and Clewin 6 is available instead. It is available as evaluation version and expires on 01 September 2025.

You can find the official user guide to CleWin 6 (CleWin6Help.pdf) in your local CleWin6-installation directory. Standard directory: C:\Program Files\CleWin6.1 evaluation version (for Clewin 5: C:\Program Files (x86)\CleWin5).

To help you get started, we also offer a self study Mask Design course.

CleWin 6 - installation on your Windows PC

CleWin6 can be installed via the DTU Software Center

Alternatively an installer can be downloaded from the cleanroom drive (typically mapped as O:\ drive):
\CleanroomDrive\_TPT\TPT Mask Design\For CleWin\CleWin 6 software\

Please copy the zip-file to your local drive, extract it and run the installation program CleWin61_64bit_evaluation_setup.exe (as administrator). After installation, start the program Clewin 6.

Note: Please uninstall Clewin when you finish your study at DTU. Each installation consumes one of our licenses.

Please contact Jesper Hanberg or training@nanolab.dtu.dk, if you have any problems or questions.

CleWin 6 - installation on your Apple or Linux computer

CleWin is only available for Windows. If you need to run CleWin on your Apple or Linux machine, you need to install a windows emulator. After that, the CleWin installation is the same as for Windows (described above). No guarantee for it to work!

CleWin 5 - video tutorial

Find a video tutorial here: https://www.youtube.com/watch?v=4mm2I9nLNTA