Specific Process Knowledge/Etch/III-V ICP/GaN
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GaN etching using III-V ICP
| Recipe | GaN Etch | GaN Etch for Si check |
| Cl2 flow | 30 sccm | 27 sccm |
| Ar flow | 10 sccm | 3 sccm |
| BCl3 flow | 0 sccm | 3 sccm |
| Platen power | 200 W | 75 W |
| Coil power | 600 W | 400 W |
| Pressure | 2 mTorr | 4 mTorr |
| Platen chiller temperature | 20 oC | 20 oC |
| Results (GaN Etch) | |
| GaN etch rate | 550-580 nm/min |
| SiO2 etch rate | 110-120 nm/min |
| Sidewall angle | ~ 90 o |
| Results (GaN Etch for Si check) | |
| Si etch rate | ~200 nm/min (bghe 2017-01-17) full 4" wafer |
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