Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/211nmzep

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  • The profiles of the 340 nm zep resist
  • The 30 nm zep profile
    The 30 nm zep profile
  • The 60 nm zep profile
    The 60 nm zep profile
  • The 90 nm zep profile
    The 90 nm zep profile
  • The 120 nm zep profile
    The 120 nm zep profile
  • The 150 nm zep profile
    The 150 nm zep profile
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