Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep
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Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab
- The profiles of the 180 nm zep resist
The 30 nm zep profile
The 60 nm zep profile
The 90 nm zep profile
The 120 nm zep profile
The 150 nm zep profile
