Source: The National Physical Laboratory - Kaye and Laby

The National Physical Laboratory tables in the links below are quite extensive. The information on melting points and boiling points for various inorganic compounds may guide you to choosing the right chemistry for your dry etch process. If you wonder how this works, then sign up for the Dry Etch TPT. You must, however, always consult with dry etch staff before you start developing new etch recipes.