Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv

Process runs

Date	Substrate Information				Process Information				SEM Images
	Wafer info	Mask	Material/ Exposed area	Tool / Operator	Conditioning	Recipe	Wafer ID	Comments
20/11-2014	6" Wafer with 210 nm oxide and 1800 nm polysilicon	standard stepper mask (50 nm barc + 320 nm krf)	Si / 50+ %	Pegasus/jmli	10 minute TDESC clean + 45 sec barc etch	nanolab/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes	S004675	Old showerhead
1/12-2014	1/4 6" Wafer with 210 nm oxide and 1800 nm polysilicon crystalbonded on carrier	standard stepper mask (50 nm barc + 320 nm krf)	Si / 50+ %	Pegasus/jmli	10 minute TDESC clean + 45 sec barc etch	nanolab/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes	S004675	New showerhead