| Recipe
|
General
|
Pressure
|
Gases
|
Generators
|
Matching
|
Results
|
| C4F8
|
SF6
|
Coil
|
Platen
|
Coil
|
Platen
|
| T
|
S/E
|
Dp
|
D
|
B
|
M
|
D
|
B
|
M
|
D
|
B
|
M
|
Dp
|
Dep
|
L
|
T
|
L
|
T
|
Pressure
|
Runs
|
| H/L
|
Cyc
|
Et
|
D
|
B
|
M
|
D
|
B
|
M
|
D
|
B
|
M
|
Et
|
D
|
B
|
M
|
L
|
T
|
L
|
T
|
Keywords
|
| DREM 2kW micro
|
Pump to base, Clamp Substrate, home platen matching unit, stabilisation
|
|
8
|
| 0
|
D/E
|
1.2
|
|
|
100%
|
0.3@5
|
0.5@ 50
|
200
|
0.3@ 200
|
0.5@ 200
|
15
|
2
|
1
|
40
|
50
|
32.5
|
51.9
|
|
| HF
|
|
3
|
|
|
100%
|
0.5@ 100
|
|
5
|
2@ 15
|
0.3@ 100
|
200
|
2
|
1@1
|
1@ 100
|
1
|
40
|
50
|
32.5
|
51.9
|
| DREM 2kW micro
|
Pump to base, Clamp Substrate, home platen matching unit, stabilisation
|
|
1
|
| -19
|
D/E
|
1.2
|
|
|
100%
|
0.3 @5
|
0.5@ 50
|
200
|
0.3@ 200
|
0.5@ 200
|
15
|
2
|
1
|
40
|
50
|
32.5
|
51.9
|
|
| HF
|
|
3
|
|
|
100%
|
0.5@ 100
|
|
5
|
2@ 15
|
0.3@ 100
|
200
|
2
|
1@1
|
1@ 100
|
1
|
40
|
50
|
32.5
|
51.9
|
