Specific Process Knowledge/Characterization/XPS/Processing
Feedback to this page: click here
Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab
XPS Data processing with Avantage
How to analyze data
In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.
XPS Simplified
The web page XPS Simplified is a ThermoScientific page where you can find a lot of information about the techniques, the hardware, data analysis etc.
XPS Knowledge View
A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click HERE to get information on how to access XPS Knowledge View in Avantage.
Basic instructions
Click HERE to have a complete walk-through of an example. This includes
- Open data file
- Open and analyze survey spectrum
- Analyze high resolution spectra of the individual spectra:
- Add background
- Add peaks
- Quantify
- Analyze depth profiles
Guidelines on data processing
Click HERE to see some general guidelines on data processing in Avantage.
Introduction to data analysis with Avantage by Thermofisher
In the Youtube video below, the application specialist from Thermorfisher Paul Mack walks you through Avantage...somewhat slowly..
Examples of data analysis
Periodic table with binding energies of all elements
XPS data analysis with CasaXPS
CasaXPS has its own Youtube channel with more than 250 videos so it would be a complete waste of time to make any instructions here. Instead, this is where you as a CasaXPS user could contribute to this database: In case you found any Youtube video that was particularly good, please notify us and we will post a link.
In order to use CasaXPS, you will need to export the data from Avantage and convert it into the Vamas format. Click this link to find more information.