Specific Process Knowledge/Characterization/XPS/Access
How to get access to the XPS
Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab
If you already a user at DTU Nanolab and have access to LabManager you must complete the access request form following the link below:
Theoretical background material
The course material of an XPS course offered at the Technical University of Munich explains the theory behind XPS. Read sections 1-4.3 (pages 1-16) of File:Electron Spectroscopy of surfaces.pdf.