Specific Process Knowledge/Characterization/XPS/Access

From LabAdviser

How to get access to the XPS

Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab

If you already a user at DTU Nanolab and have access to LabManager you must complete the access request form following the link below:

Theoretical background material

The course material of an XPS course offered at the Technical University of Munich explains the theory behind XPS. Read sections 1-4.3 (pages 1-16) of File:Electron Spectroscopy of surfaces.pdf.