Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry

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Atomika SIMS NO LONGER AVAILABLE

Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab

We have decommissioned the SIMS we had at DTU Nanolab. We can guide you to another site for SIMS analysis, take a look here: [1].

The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined..