Specific Process Knowledge/Characterization/SEM Gemini 1/use
Detectors Se2 Inlens Inlens ESB BSD1 VPSE STEM
High vacuum
Low vacuum
NanoVP
XVP
| Detectors | Se2 | Inlens | Inlens ESB | BSD1 | VPSE | STEM | Header text |
|---|---|---|---|---|---|---|---|
| High vacuum | Yes | Yes | Yes | Yes | Example | Example | Example |
| Low vacuum | Example | Example | Example | Example | Example | Example | Example |
| Example | Example | Example | Example | Example | Example | Example | Example |
| Example | Example | Example | Example | Example | Example | Example | Example |
| Example | Example | Example | Example | Example | Example | Example | Example |
| Example | Example | Example | Example | Example | Example | Example | Example |