Specific Process Knowledge/Characterization/Probe station

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Probe station

Probe station. Positioned in serviceroom CX1

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The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.

Samples can be inspected by either a microscope and/or a camera.

Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.

Equipment performance and process related parameters

Purpose	Electrical measurements	I/V Resistance Data collection by PC possible
Performance	Pad size	100x100µm or more
Substrates	Batch size	One sample
	Substrate materials allowed	No restrictions

The user manual, technical information and contact information can be found in LabManager:

Probe station