Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics

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Spot sizes and optics
Wavelength [nm] Objective [mm] Scanfield [mm2] Telescope Magnification Rayleigh- length [mm] Theoretical min Spotdiameter (1/e2) [um] Working distance [mm]
TB 355 103 45 x 45 3X 0,972 21 135
TB 355 103 45 x 45 6X 0,25 10,5 135
TB 355 255 145 x 145 3X 5,96 51,9 313
TB 355 255 145 x 145 6X 1,49 26 313
TB 532 100 54 x 54 3X 0,823 23 126
TB 532 100 54 x 54 4X 0,46 18 126
TB 532 255 165 x 165 3X 5,35 60,2 293
TB 532 255 165 x 165 4X 3,01 45,2 293
TB 1064 100 54 x 54 3X 0,76 32,2 126
TB 1064 100 54 x 54 6X 0,29 19,8 126
TB 1064 255 165 x 165 3X 4,97 82 292
TB 1064 255 165 x 165 6X 1,87 50,4 292
IPG 1064 100 54 x54 1X 0,61 29 126
IPG 1064 255 165 x 165 1X 3,99 73,5 292

Bold lines are the current optics mounted.

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