Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics
Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.
| Wavelength [nm] | Objective [mm] | Scanfield [mm2] | Telescope Magnification | Rayleigh- length [mm] | Theoretical min Spotdiameter (1/e2) [um] | Working distance [mm] |
| 343 | 103 | 45 x 45 | 3X | 0,972 | 21 | 135 |
| 343 | 103 | 45 x 45 | 6X | 0,25 | 10,5 | 135 |
| 343 | 255 | 145 x 145 | 3X | 5,96 | 51,9 | 313 |
| 343 | 255 | 145 x 145 | 6X | 1,49 | 26 | 313 |
| 515 | 100 | 54 x 54 | 3X | 0,823 | 23 | 126 |
| 515 | 100 | 54 x 54 | 4X | 0,46 | 18 | 126 |
| 515 | 255 | 165 x 165 | 3X | 5,35 | 60,2 | 293 |
| 515 | 255 | 165 x 165 | 4X | 3,01 | 45,2 | 293 |
| 1030 | 100 | 54 x 54 | 3X | 0,76 | 32,2 | 126 |
| 1030 | 100 | 54 x 54 | 6X | 0,29 | 19,8 | 126 |
| 1030 | 255 | 165 x 165 | 3X | 4,97 | 82 | 292 |
| 1030 | 255 | 165 x 165 | 6X | 1,87 | 50,4 | 292 |
Bold lines are the current optics mounted.