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08:29, 29 September 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/TRACER (content was: "Delete me", and the only contributor was "Thope" (talk))
15:01, 4 September 2025 Bghe talk contribs deleted page Specific Process Knowledge/Thin Film deposition/ALD/Al2O3 deposition using ALD (content was: "This page needs to be deleted!")
15:01, 4 September 2025 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Germanium/Thermal Ge deposition Wordentec (content was: " Page to be deleted")
13:14, 2 September 2025 Bghe talk contribs created page File:RC2 system.jpg (File uploaded with MsUpload)
13:14, 2 September 2025 Bghe talk contribs uploaded File:RC2 system.jpg (File uploaded with MsUpload)
13:18, 14 July 2025 Bghe talk contribs created page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Silicon Nitride Etch (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/RIE_(Reactive_Ion_Etch) click here]''' =THIS PAGE IS UNDER CONSTRUCTION200px=")
08:43, 11 June 2025 Bghe talk contribs changed group membership for Mmat from NLAB-Employees-701 and NLAB-LabmanagerAllUsers to NLAB-Employees-701, NLAB-LabmanagerAllUsers and administrator
13:55, 6 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/RaithElphyManual (content was: "'''Feedback to this page''': '''[mailto:e-beam@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography click here]''' = THIS PAGE IS UNDER CONSTRUCTION200px = Purpose, location and technical specifications = '''OBSOLETE! This to...", and the only contributor was "Tigre" (talk))
09:23, 6 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL Processes (content before blanking was: "THIS PAGE IS UNDER CONSTRUCTION200px =Large area circle arrays= Arrays of circles can naturally be exposed by exposing a pattern that consists of circles. In this scheme each circle will consist of a number of beam shots to fill the shape of each circle. For large areas this can however be very time consuming and pattern files can become very large. Hence, in this work we investigate a di...")
13:43, 5 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/ARP617 (content before blanking was: "Test of copolymer AR-P 617.05; a positive e-beam resist from AllResist. This copolymer is meant to be used as a sacrificial layer in a bi- or tri-layer e-beam resist stack (i.e. bottom layer). The copolymer adheres well on many substrates and can be dry-etched isotropically (to create under-cut) and anisotropically by reactive ion etch. Furthermore, it is softbaked at temperatures above 200 degrees and thus themally stable to many post-processing steps. This is...")
07:53, 5 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Molybdæn (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px= <code><nowiki>=THIS PAGE IS UNDER CONSTRUCTION200px=</nowiki></code>  ==Comp...", and the only contributor was "Mbec" (talk))
13:48, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/HfO2 etch (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/HfO2_etch click here]''' =THIS PAGE IS UNDER CONSTRUCTION200px= =jklajakjg= ==jglasdjfg==", and the only contributor was "Shuya" (talk))
13:27, 2 May 2025 Bghe talk contribs deleted page Substrates/130 mm by 130 mm by 6.35 mm substrates (not existing)
12:55, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegsus-1 (content was: "'''WRONG ADDRESS - MUST BE DELETED!!!!!''' '''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' Equipment info in [http://labmanager.nanolab.dtu.dk/function.php?module=Machine&view=view&mach=265| LabManager] == Process information == '''SPTS process notation''' Describing a proces...", and the only contributor was "Jmli" (talk))
12:51, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus 3/DREM0.5kWv2.3 (content was: "", and the only contributor was "Jmli" (talk))
12:51, 2 May 2025 Bghe talk contribs deleted page LabAdviser/314/Microscopy 314-307/TEM/T20/Schematic (content before blanking was: "800px")
12:50, 2 May 2025 Bghe talk contribs deleted page LabAdviser/314/Microscopy 314-307/TEM/T20/Booking rules (content before blanking was: "'''Tecnai TEM Booking rules:''' '''1) Booking''' Each Tecnai user can book up to 2 SESSIONS in advance. This means that users can have only 2 SESSIONS booked for the future. It does not matter how far in the future the two sessions are booked. e.g. sessions can be booked for today & tomorrow, or today and Monday next week. Once you have 2 sessions booked, you can't book any more. As soon as you have finished one session, you can then book another. But you ca...")
12:50, 2 May 2025 Bghe talk contribs deleted page LabAdviser/CEN (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/CEN click here]''' =This page gives an overview of the electron microscope equipment and other related resources connected to DTU Nanolab - building 307/314= ==SEM== *SEM Comparison page - all of DTU Nanolabs SEMs */Nova Nan...")
12:49, 2 May 2025 Bghe talk contribs deleted page LabAdviser/CEN/AFEG 250 Analytical ESEM (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=LabAdviser/CEN/Quanta_FEG_200_ESEM click here]'''  The FEI AFEG 250 FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can o...")
10:18, 1 May 2025 Bghe talk contribs created page Specific Process Knowledge/Preparation (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Preparation click here]''' =THIS PAGE IS UNDER CONSTRUCTION200px=")
13:07, 31 March 2025 Bghe talk contribs deleted page LabAdviser/Courses/TPT Lithography (content was: "This page can be deleted <!--- '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Lithography click here]''' DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipm...")
12:42, 31 March 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Polymer/Etch of Photo Resist using RIE (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Polymer/Etch_of_Photo_Resist_using_RIE click here]''' = Both RIE's (RIE1 and RIE2) for silicon based etching has been decommissioned = * This information is save because it might be valuable as inspiration for other dry etch s...")
12:03, 31 March 2025 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Sputtering of ITO in Sputter-System Metal-Oxide (PC1) (content was: "PLEASE DELETE THIS PAGE!", and the only contributor was "Eves" (talk))
12:03, 31 March 2025 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/XRD/XRD SmartLab/ALD deposited alumina and titania XRR and SE comparison (content was: "Empty page need to be deleted!", and the only contributor was "Eves" (talk))
13:20, 28 March 2025 Bghe talk contribs created page Specific Process Knowledge/Etch/Lithium niobate (Created page with "sdddd")
13:25, 25 February 2025 Bghe talk contribs created page File:20250213 04 endpoint.jpg (File uploaded with MsUpload)
13:25, 25 February 2025 Bghe talk contribs uploaded File:20250213 04 endpoint.jpg (File uploaded with MsUpload)
13:25, 25 February 2025 Bghe talk contribs created page File:20250213 04 droppoint.jpg (File uploaded with MsUpload)
13:25, 25 February 2025 Bghe talk contribs uploaded File:20250213 04 droppoint.jpg (File uploaded with MsUpload)
13:23, 25 February 2025 Bghe talk contribs created page File:20250213 02 toppoint.jpg (File uploaded with MsUpload)
13:23, 25 February 2025 Bghe talk contribs uploaded File:20250213 02 toppoint.jpg (File uploaded with MsUpload)
13:23, 25 February 2025 Bghe talk contribs created page File:20250213 02 endpoint.jpg (File uploaded with MsUpload)
13:23, 25 February 2025 Bghe talk contribs uploaded File:20250213 02 endpoint.jpg (File uploaded with MsUpload)
13:22, 25 February 2025 Bghe talk contribs created page File:20250213 08 endpoint.jpg (File uploaded with MsUpload)
13:22, 25 February 2025 Bghe talk contribs uploaded File:20250213 08 endpoint.jpg (File uploaded with MsUpload)
13:22, 25 February 2025 Bghe talk contribs created page File:20250213 08 droppoint.jpg (File uploaded with MsUpload)
13:22, 25 February 2025 Bghe talk contribs uploaded File:20250213 08 droppoint.jpg (File uploaded with MsUpload)
13:21, 25 February 2025 Bghe talk contribs created page File:20250213 06 toppoint.jpg (File uploaded with MsUpload)
13:21, 25 February 2025 Bghe talk contribs uploaded File:20250213 06 toppoint.jpg (File uploaded with MsUpload)
13:21, 25 February 2025 Bghe talk contribs created page File:20250213 06 endpoint.jpg (File uploaded with MsUpload)
13:21, 25 February 2025 Bghe talk contribs uploaded File:20250213 06 endpoint.jpg (File uploaded with MsUpload)
11:51, 19 February 2025 Bghe talk contribs created page File:Data 03 screen shot 02.jpg (File uploaded with MsUpload)
11:51, 19 February 2025 Bghe talk contribs uploaded File:Data 03 screen shot 02.jpg (File uploaded with MsUpload)
11:51, 19 February 2025 Bghe talk contribs created page File:Data 03 screen shot 01.jpg (File uploaded with MsUpload)
11:51, 19 February 2025 Bghe talk contribs uploaded File:Data 03 screen shot 01.jpg (File uploaded with MsUpload)
11:34, 19 February 2025 Bghe talk contribs created page File:Data 05 screen shot 04.jpg (File uploaded with MsUpload)
11:34, 19 February 2025 Bghe talk contribs uploaded File:Data 05 screen shot 04.jpg (File uploaded with MsUpload)
11:34, 19 February 2025 Bghe talk contribs created page File:Data 05 screen shot 02.jpg (File uploaded with MsUpload)
11:34, 19 February 2025 Bghe talk contribs uploaded File:Data 05 screen shot 02.jpg (File uploaded with MsUpload)
15:54, 18 February 2025 Bghe talk contribs created page File:S047671midt cr 13.jpg (File uploaded with MsUpload)