LabAdviser/Courses/TPT Thin Film
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Thin Film Tool Package Training
DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.
Course Layout
- Online lecture videos (theory)
- Quizzes for each section
- Individual hands-on training (specific equipment)
Individual ands on training can be requested via training@nanolab.dtu.dk.
Learning objectives
- Understand different film deposition methods
- Learn different thin film formation mechanisms
- be aware of relevant materials properties
- compare and be able to understand appropriate thin film techniques
- introduction to equipment at DTU Nanolab
Course Contents
- Introduction to Thin Film Techniques
- Thin Film Formation
- Material Properties
- Overview over Thin Film Techniques
- Physical Vapour Deposition (PVD)
- Introduction to PVD
- Resistive thermal evaporation
- E-beam Evaporation
- Sputtering
- Thermal Oxidation
- Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD)
Qualifying Prerequisites
- Cleanroom safety course at DTU Nanolab
- Admission to the cleanroom must be obtained before the group training session
Course Responsible
- Pernille Voss Larsen
- Evgeniy Shkondin
If you have questions you can contact us via thinfilm@nanolab.dtu.dk.
Knowledge and Information about Thin Film Techniques
Introduction to Thin Films
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films
- D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
- K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films
Thermal oxidation
Stress in Thin Films
- Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
- Dektak stress measurements