File:WF 2E08a 23mar2011-120.jpg
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Etching of nanostructures in Si using DRIE-Pegasus: nano1.42 recipe, Run ID 2017, time 120 secs, SF6 38, C4F8 75, 4mtorr, 800/40 coil/platen, -20 degs.
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 09:29, 9 May 2011 | | 1,024 × 768 (119 KB) | Jml (talk | contribs) | Etching of nanostructures in Si using DRIE-Pegasus: nano1.42 recipe, Run ID 2017, time 120 secs, SF6 38, C4F8 75, 4mtorr, 800/40 coil/platen, -20 degs. |
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