File:WF 2E01 mar23 2011 150a.jpg
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Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 14:02, 30 March 2011 | | 1,024 × 768 (84 KB) | Jml (talk | contribs) | Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs. |
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