File:WF 2C1 feb2011profile 030.jpg

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The profiles of the 340 nm thick zep resist wafers. The wafers have been over-exposed in the E-beam to make sure that all structures are opened - therefore the 30, 60, 90, 120 and 150 nm lines are somewhat wider.

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current11:29, 18 March 2011Thumbnail for version as of 11:29, 18 March 20111,024 × 768 (109 KB)Jml (talk | contribs)The profiles of the 340 nm thick zep resist wafers. The wafers have been over-exposed in the E-beam to make sure that all structures are opened - therefore the 30, 60, 90, 120 and 150 nm lines are somewhat wider.

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