File:SU8-oxygen-etch Q12.jpg

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SU-8 etched in an oxygen plasma. High antimony concentration in surface layer.

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current08:58, 4 November 2013Thumbnail for version as of 08:58, 4 November 20131,024 × 943 (134 KB)Khara (talk | contribs)SU-8 etched in an oxygen plasma. High antimony concentration in surface layer.

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