File:SU8-SU8aniso R15.jpg

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SU-8 etched with SU8aniso, anisotropy 0.8, etch rate ~400nm/min, antimony surface layer concentration <2%

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current09:03, 4 November 2013Thumbnail for version as of 09:03, 4 November 20131,024 × 943 (116 KB)Khara (talk | contribs)SU-8 etched with SU8aniso, anisotropy 0.8, etch rate ~400nm/min, antimony surface layer concentration <2%

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