File:SU8-SU8aniso R15.jpg
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SU-8 etched with SU8aniso, anisotropy 0.8, etch rate ~400nm/min, antimony surface layer concentration <2%
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 09:03, 4 November 2013 | 1,024 × 943 (116 KB) | Khara (talk | contribs) | SU-8 etched with SU8aniso, anisotropy 0.8, etch rate ~400nm/min, antimony surface layer concentration <2% |
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