File:Rs on 4in boron doped poly .png

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Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour. Result from Trine H. Christensen DTU Space

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current15:04, 17 February 2015Thumbnail for version as of 15:04, 17 February 20151,164 × 938 (31 KB)Paphol (talk | contribs)Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour. Result from Trine H. Christensen DTU Space

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